2001-2005 [2005.01.07] Effects of abrasive size and surfactant concentration on the non-prestonian behavior of ceria slurry in shallow trench isolation chemical mechanical polishing
2019.06.26 15:35
Hyun-Goo Kang, Takeo Katoh, Hyung-Soon Park, Ungyu Paik and Jea-Gun Park
Effects of abrasive size and surfactant concentration on the non-prestonian behavior of ceria slurry in shallow trench isolation chemical mechanical polishing