72 |
[2003.07.16] High Selective Nano Ceria Slurry : Abrasive Size and Surfractant Effects
|
71 |
[2003.07.14] Correlation between the ordered structure and the valence-band splitting in highly strained CdxZn1-xTe epilayers
|
70 |
[2003.06.01] Crystal structures of two variants for CuPtb-type ordering in strained CdxZn1-xTe epilayers
|
69 |
[2003.04.__] 고성능 나노 세리아 슬러리 개발 - 256메가 DRAM급 이상 초고집적 반도체 STI 연마 공정용
|
68 |
[2003.04.__] Dependence of crystal nature on the gettering efficiency of iron and nickel in a Czochralski silicon wafer
|
67 |
[2003.03.15] Effects of the physical characteristics of cerium oxide on plasma-enhanced tetraethylorthosiliate removal rate of chemical mechanical polishing for shallow trench isolation
|
66 |
[2003.03.15] Effects of abrasive morphology and surfactant concentration on polishing rate of ceria slurry
|
65 |
[2003.02.20] Electron Mobility Behavior in Ultra Thin and Strained Si Inversion Layer Grown on SiGe-On-Insulator for 50nm MOS-FETs
|
64 |
[2002.10.__] Effect of crystallinity of ceria particles on the PETEOS removal rate in chemical mechanical polishing for shallow trench isolation
|
63 |
[2002.10.25] Polishing Condition Dependency of Nanotopography Impacts on Oxide Chemical Mechanical Polishing
|
62 |
[2002.10.25] Electronic parameter variations of the two-dimensional electron gas in modulation-doped nanoscale step quantum wells due to a nanosize embedded potential barrier
|
61 |
[2002.10.25] Effect of Slurry and Pad on Nanotopography Impact on Oxide CMP
|
60 |
[2002.10.25] Application of MPEG-4 Video to Standalone-based Unmanned Monitoring System
|
59 |
[2002.10.25] A Study of Interactive T-Commerce Service based on Data Broadcasting
|
58 |
[2002.07.24] New Spectral Analysis Method to Quantify Nanotopography Impact on CMP
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