2001-2005 [2004.08.10] Dependency of precipitation of interstitial oxygen on its crystal nature in Czochralski silicon wafer
2019.05.02 18:04
Gon-Sub Lee, Ki-Hoon Park, Jun Furukawa, Hisashi Furuya, Kae-Dal Kwack and Jea-Gun Park
Dependency of precipitation of interstitial oxygen on its crystal nature in Czochralski silicon wafer