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2016-2020 [2017.08.16] Improved Etch Characteristics of Magnetic Tunneling Junction Materials by Using Helium

2021.08.12 14:16

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Improved Etch Characteristics of Magnetic Tunneling Junction Materials by Using Helium

 

Sungwoo Park, Kyungchae Yang, Hoseok Lee, Dongwoo Kim, Jongung Baek, Taehun Shim, Jeagun Park and Geunyoung Yeom

 

ECS J. Solid State Sci. Technol. 6 (2017) N148

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