2011-2015 [2011.04.13] Chemical Mechanical Planarization Mechanism for Nitrogen-Doped Polycrystalline Ge2Sb2Te5 Film Using Nitric Acidic Slurry Added with Hydrogen Peroxide
2021.02.27 18:01
Hao Cui, Jong-Young Cho, Jin-Hyung Park, Hyung Soon Park and Jea-Gun Park
Chemical Mechanical Planarization Mechanism for Nitrogen-Doped Polycrystalline Ge2Sb2Te5 Film Using Nitric Acidic Slurry Added with Hydrogen Peroxide