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공지 Update 진행중
71 [2003.06.01] Crystal structures of two variants for CuPtb-type ordering in strained CdxZn1-xTe epilayers file
70 [2003.04.__] 고성능 나노 세리아 슬러리 개발  - 256메가 DRAM급 이상 초고집적 반도체 STI 연마 공정용
69 [2003.04.__] Dependence of crystal nature on the gettering efficiency of iron and nickel in a Czochralski silicon wafer file
68 [2003.03.15] Effects of the physical characteristics of cerium oxide on plasma-enhanced tetraethylorthosiliate removal rate of chemical mechanical polishing for shallow trench isolation file
67 [2003.03.15] Effects of abrasive morphology and surfactant concentration on polishing rate of ceria slurry file
66 [2003.02.20] Electron Mobility Behavior in Ultra Thin and Strained Si Inversion Layer Grown on SiGe-On-Insulator for 50nm MOS-FETs
65 [2002.10.__] Effect of crystallinity of ceria particles on the PETEOS removal rate in chemical mechanical polishing for shallow trench isolation
64 [2002.10.25] Polishing Condition Dependency of Nanotopography Impacts on Oxide Chemical Mechanical Polishing
63 [2002.10.25] Electronic parameter variations of the two-dimensional electron gas in modulation-doped nanoscale step quantum wells due to a nanosize embedded potential barrier
62 [2002.10.25] Effect of Slurry and Pad on Nanotopography Impact on Oxide CMP
61 [2002.10.25] Application of MPEG-4 Video to Standalone-based Unmanned Monitoring System
60 [2002.10.25] A Study of Interactive T-Commerce Service based on Data Broadcasting
59 [2002.07.24] New Spectral Analysis Method to Quantify Nanotopography Impact on CMP
58 [2002.07.11] The effect of agglomerated particle size on the chemical mechanical planarization for shallow trench isolation
57 [2002.07.01] The stability of nano fumed silica particles and its influence on chemical mechanical planarization for interlayer dielectrics file