2011-2015 [2011.09.23] Effect of Nonionic Polymer as Corrosion Inhibitor in Alkaline Media for Polycrystalline Ge2Sb2Te5 Chemical Mechanical Planarization
2021.03.06 13:52
Jong-Young Cho, Hao Cui, Jin-Hyung Park, Hyung-Soon Park and Jea-Gun Park
Effect of Nonionic Polymer as Corrosion Inhibitor in Alkaline Media for Polycrystalline Ge2Sb2Te5 Chemical Mechanical Planarization