2011-2015 [2012.09.27] High polishing selectivity ceria slurry for formation of top electrode in spin-transfer torque magnetic random access memory
2021.03.07 13:27
Hao Cui, Jae-Hyung Lim, Jin-Hyung Park and Jea-Gun Park
High polishing selectivity ceria slurry for formation of top electrode in spin-transfer torque magnetic random access memory