2006-2010 [2006.06.08] Effect of Calcination Process on Synthesis of Ceria Particles, and Its Influence on Shallow Trench Isolation Chemical Mechanical Planarization Performance
2020.08.18 18:30
Dae-Hyeong Kim, Hyun-Goo Kang, Sang-Kyun Kim, Ungyu Paik and Jea-Gun Park
Effect of Calcination Process on Synthesis of Ceria Particles, and Its Influence on Shallow Trench Isolation Chemical Mechanical Planarization Performance