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Dae-Hyeong Kim, Hyun-Goo Kang, Sang-Kyun Kim, Ungyu Paik and Jea-Gun Park

 

Effect of Calcination Process on Synthesis of Ceria Particles, and Its Influence on Shallow Trench Isolation Chemical Mechanical Planarization Performance

 

Jpn. J. Appl. Phys. 45 (2006) 4893

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» [2006.06.08] Effect of Calcination Process on Synthesis of Ceria Particles, and Its Influence on Shallow Trench Isolation Chemical Mechanical Planarization Performance file
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