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[2022.11.14] Chemical mechanical planarization mechanism of epitaxially grown Ge-film for sequential integrating 3D-structured transistor cells

2023.03.06 14:06

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Chemical mechanical planarization mechanism of epitaxially grown Ge-film for sequential integrating 3D-structured transistor cells

 

https://doi.org/10.1007/s40042-022-00662-0
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