메뉴 건너뛰기

Dishing-free chemical mechanical planarization for copper films

 

Sang-Su Yun, Young-Hye Son, Gi-ppeum Jeong, Je-hwan Lee, Jong-han Jeong, Jae-Young Bae, Sung-In Kim, Jin-Hyung Park and Jea-Gun Park

 

Colloids and Surfaces A 616 (2021) 126143

번호 제목
348 [2021.06.18] Enhanced performance of polymer solar cells using selective silver nanocrystal morphology file
347 [2021.06.04] Self-stopping slurry for planarizing extremely high surface film topography in nanoscale semiconductor devices file
346 [2021.05.28] Extremely high photoconductivity ultraviolet-light sensor using amorphous In–Ga–Zn–O thin-film-transistor file
» [2021.05.05] Dishing-free chemical mechanical planarization for copper films file
344 [2021.04.01] Doping-less tunnel field-effect transistors by compact Si drain frame/Si0.6Ge0.4-channel/Ge source file
343 [2021.01.29] Etch characteristics of magnetic tunnel junction materials using H-2/NH3 reactive ion beam file
342 [2021.01.13] Design of n+-Base Width of Two-Terminal-Electrode Vertical Thyristor for Cross-Point Memory Cell Without Selector file
341 [2020.12.15] Impact of wet ceria abrasive size on initial step height removal efficiency for Isolated SiO2 film chemical mechanical planarization file
340 [2020.11.20] Relationship of Free Surface Area with Oxygen Concentration in Silicon Ingot Grown by Czochralski Method for High Efficiency Solar Cells file
339 [2020.06.28] An electroforming-free mechanism for Cu2O solid-electrolyte-based conductive-bridge random access memory (CBRAM) file
338 [2020.06.18] Multi-level resistance uniformity of double pinned perpendicular magnetic-tunneljunction spin-valve depending on top MgO barrier thickness file
337 [2020.06.08] A Bow-free Freestanding GaN Wafer file
336 [2020.06.01] Highly Selective Polishing Rate Between a Tungsten Film and a Silicon-Dioxide Film by Using a Malic-Acid Selectivity Agent in Tungsten-Film Chemical-Mechanical Planarization file
335 [2020.05.18] Interfacial Chemical and Mechanical Reactions between Tungsten-Film and Nano-Scale Colloidal Zirconia Abrasives for Chemical-Mechanical-Planarization file
334 [2020.05.05] Facile synthesis of cobalt–nickel sulfide thin film as a promising counter electrode for triiodide reduction in dye-sensitized solar cells file