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2001-2005 [2004.09.__] Proximity gettering process for 300-mm silicon wafers

2019.05.02 18:08

Administrator 조회 수:54

Gon Sub Lee and Jea Gun Park

 

Proximity gettering process for 300-mm silicon wafers 

 

J. Cera. Process. Research 5 (2004) 251

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