2001-2005 [2004.11.__] Characteristics of Ru barrier layer in Mo/Ru/Si multilayer for EUV reflector applications
2019.05.02 18:14
Tae Geun Kim, Jinho Ahn, Seung Yoon Lee and Jea Gun Park
Characteristics of Ru barrier layer in Mo/Ru/Si multilayer for EUV reflector applications