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2001-2005 [2005.06.01] Cu-CMP에서 Alanine이 Cu와 TaN의 선택비에 미치는 영향

2019.06.26 15:44

Administrator 조회 수:246

박진형, 김민석, 백운규, 박재근

 

Cu-CMP에서 Alanine이 Cu와 TaN의 선택비에 미치는 영향

 

한국재료학회지 15 (2005) 426

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