2001-2005 [2005.10.15] Influences of pH and concentration of Surfactant on the Electrokinetic Behavior of a Nano-Ceria Slurry in shallow Trench Isolation Chemical Mechanical Polishing
2019.06.26 15:49
Hyun-Goo Kang, Takeo Katoh, Jea-Gun Park, Ungyu Paik and Hyung-Soon Park
Influences of pH and concentration of Surfactant on the Electrokinetic Behavior of a Nano-Ceria Slurry in shallow Trench Isolation Chemical Mechanical Polishing