2001-2005 [2005.12.08] The Effect of Cerium Precursor Agglomeration on the Synthesis of Ceria Particles and Its Influence on Shallow Trench Isolation Chemical Mechanical Polishing Performance
2019.06.26 15:54
Dae-Hyeong Kim, Sang-Kyun Kim, Hyun-Goo Kang, Jea-Gun Park and Ungyu Paik
The Effect of Cerium Precursor Agglomeration on the Synthesis of Ceria Particles and Its Influence on Shallow Trench Isolation Chemical Mechanical Polishing Performance