2006-2010 [2006.05.09] Dependence of Non-Prestonian Behavior of Ceria Slurry with Anionic Surfactant on Abrasive Concentration and Size in Shallow Trench Isolation Chemical Mechanical Polishing
2020.08.18 17:32
Hyun-Goo Kang, Dae-Hyeong Kim, Takeo Katoh, Sung-Jun Kim, Ungyu Paik and Jea-Gun Park
Dependence of Non-Prestonian Behavior of Ceria Slurry with Anionic Surfactant on Abrasive Concentration and Size in Shallow Trench Isolation Chemical Mechanical Polishing