2006-2010 [2006.09.07] Reduction of Large Particles in Ceria Slurry by Aging and Selective Sedimentation and its Effect on Shallow Trench Isolation Chemical Mechanical Planarization
2020.08.18 18:37
Dae-Hyeong Kim, Hyun-Goo Kang, Sang-Kyun Kim, Ungyu Paik and Jea-Gun Park
Reduction of Large Particles in Ceria Slurry by Aging and Selective Sedimentation and its Effect on Shallow Trench Isolation Chemical Mechanical Planarization