2011-2015 [2012.11.27] Effect of Oxidizers on Chemical Mechanical Planarization of Ruthenium with Colloidal Silica Based Slurry
2021.03.07 13:29
Hao Cui, Jin-Hyung Park and Jea-Gun Park
Effect of Oxidizers on Chemical Mechanical Planarization of Ruthenium with Colloidal Silica Based Slurry