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2011-2015 [2014.12.01] Effect of RF Pulsing Biasing on the Etching of Magnetic Tunnel Junction Materials Using CH3OH

2021.08.12 13:59

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Effect of RF Pulsing Biasing on the Etching of Magnetic Tunnel Junction Materials Using CH3OH

 

Min Hwan Jeon, Deok Hyun Yun, Kyung Chae Yang, Ji Youn Youn, Du Yeong Lee, Tae Hun Shim, Jea Gun Park and Geun Young Yeom

 

J. Nanosci. Nanotechnol. 14 (2014) 9680

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