[2021.11.30] Two-Step Hydrogen-Ion Implantation Annihilation of Threading Dislocation Defects in Strain-Relaxed Si0.7Ge0.3
2022.01.06 15:11
Two-Step Hydrogen-Ion Implantation Annihilation of Threading Dislocation Defects in Strain-Relaxed Si0.7Ge0.3
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