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[2022.03.01] Polymer link breakage of polyimide-film-surface using hydrolysis reaction accelerator for enhancing chemical–mechanical-planarization polishing-rate

2022.03.24 00:54

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Polymer link breakage of polyimide-film-surface using hydrolysis reaction accelerator for enhancing chemical–mechanical-planarization polishing-rate

 

 

https://doi.org/10.1038/s41598-022-07340-y
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