1996-2000 [1999.09.01] Oxygen precipitation and secondary defects in silicon by high energy ion implantation and two-step annealing
2019.04.02 20:10
Sahng-Hyun Yoon, Kae-Dal Kwack, Bong-Gyun Ko, Jea-Gun Park, Jun-Yup Kim and Ryun Ruh
Oxygen precipitation and secondary defects in silicon by high energy ion implantation and two-step annealing