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이명윤, 강현구, 박진형, 박재근, 백운규

 

STI-CMP용 세리아 슬러리 공급시스템에서 거대입자와 필터 크기가 Light Point Defects(LPDs)에 미치는 영향 (Effects of Large Particles and Filter Size in Central Chemical Supplying (CCS) System for STI-CMP on Light Point Defects (LPDs))

 

반도체디스플레이기술학회지 3 (2004) 45

번호 제목
공지 Update 진행중
131 [2005.12.__] Comparison of phonon-limited electron mobility in strained Si grown on silicon on insulator (sSOI) and SiGe on insulator (SGOI) file
130 [2005.12.08] The Effect of Cerium Precursor Agglomeration on the Synthesis of Ceria Particles and Its Influence on Shallow Trench Isolation Chemical Mechanical Polishing Performance file
129 [2005.12.02] Investigation of multilayer structural changes in phase and amplitude-defects correction process file
128 [2005.11.09] Agglomerated Large Particles under Various Slurry Preparation Conditions and Their Influence on Shallow Trench Isolation Chemical Mechanical Polishing file
127 [2005.10.27] Development of Dynamic Interface for Sensor
126 [2005.10.15] Influences of pH and concentration of Surfactant on the Electrokinetic Behavior of a Nano-Ceria Slurry in shallow Trench Isolation Chemical Mechanical Polishing file
125 [2005.09.10] Dependency of Phonon-limited Electron Mobility on Si Thickness in strained SGOI  (Silicon Germanium on Insulator) n-MOSFET file
124 [2005.09.01] 차세대 비휘발성 메모리 소자 file
123 [2005.09.01] PoRAM 최근 연구 동향 및 향후 개발 방향 file
122 [2005.07.08] Dependence of pH, Molecular Weight, and Concentration of Surfactant in Ceria Slurry on Saturated Nitride Removal Rate in Shallow Trench Isolation Chemical Mechanical Polishing file
121 [2005.06.01] Cu-CMP에서 Alanine이 Cu와 TaN의 선택비에 미치는 영향 file
120 [2005.04.28] Design of Compact PIFA for Mobile Communication Handset
119 [2005.04.28] Automatic System and Productivity Elevation
118 [2005.04.01] Slip formation in 300-mm polished and epitaxial silicon wafers annealed by rapid thermal annealing file
117 [2005.03.20] 박재근 PoRAM 최근연구동향 전자공학회지 32권 2호 (2005) 53 file