2011-2015 [2012.12.01] Effect of MeV Nitrogen Ion Implantation on the Resistivity Transition in Czochralski Silicon Wafers
2021.03.07 13:30
Byeong-Sam Moon, In-Ji Lee and Jea-Gun Park
Effect of MeV Nitrogen Ion Implantation on the Resistivity Transition in Czochralski Silicon Wafers